Glass Wafer Dicing Improves Yield and Achieves Die Aspect Ratios Unheard of in the Electronics Industry
A new process that processes glass wafers with a diameter of 300mm can significantly improve yield. It can also achieve die aspect ratios that are unheard of in the semiconductor industry. 300mm Glass wafer dicing technology was originally developed for micro-optics and micro-micro-fluidics but is now being applied to brittle, glass-based semiconductor applications. Read on to find out more.
Scribing
The production of semiconductors requires precision and
accuracy when scribing glass wafers. To ensure the high quality and consistency of
the finished products, Corning uses a fully automatic scribing system with
pattern recognition systems that find the proper position for the scribe,
brake, and other components. The final step involves edge grinding. After the
scribe, the glass package is turned over a few times.
The scribing process involves rolling a small diamond wheel
over the glass surface. The scribe line creates a shallow "vent" on
the surface. This scribe can be shallow or deep and will determine the
strength, edge quality, and cleanliness of the finished product. The scribe
line thickness depends on the blade quality, scribe-wheel angle, and cutting
pressure. The cutting speed should be between 20 and 25 mm/sec to achieve
maximum accuracy.
Laser full cut dicing
The process of laser-full cut dicing of a 300-mm glass
wafer requires a high-quality, crystalline glass wafer and the laser beam. This
process is considerably more expensive than other cutting methods. However, it
is advantageous in some situations. In such cases, a hybrid laser scribing and
plasma etching approach may be used to perform the dicing.
Diamond blade dicing
The bond hardness of a diamond blade is a very important
factor in the success of dicing. This characteristic affects the durability and
performance of the blade. In general, the harder the bond hardness, the longer
the blade can stay sharp. Therefore, diamond blades with higher bond hardness
are recommended for hard and softer materials. In addition to hardness, bond
hardness also plays a major role in the life span of a diamond blade.
The number of diamonds per carat and the amount of
material that is cut is two important considerations for dicing. The lower
the mesh size, the larger the diamond crystals and the higher the diamond
density. As a general rule, a 30/40 Mesh black diamond has 660 crystals per
carat, while a 40/50 Mesh black diamond has around 1,700 crystals per carat. To
ensure maximum diamond life and minimize power consumption, consider the number
of cutting points produced.
Laser dicing
A laser is a powerful tool for semiconductor and
electronics manufacturers. The high-power pulses used in laser dicing reduce
the thickness of the silicon substrate. Laser dicing can be done at a high
speed. However, it can be difficult to perform at a low speed. However, there
are many advantages to using this technology. Here are a few of them:
Stealth dicing uses a semi-transparent wavelength of
light to cut the wafer. It targets the midpoint of the wafer and makes a small
crack. It does not reach the surface and does not cause any damage to the
glass. It is important to choose the right starting point in order to get a
perfect result. This process is ideal for removing micro-cracks from the edge
of the wafer, improving its fracture strength.
Traditional blade dicing
A blade dicing saw is a common method for cutting wafers
and is most commonly used for singulating or fracturing thin chips. However,
these saws can be used for processing-thick substrates, such as silicon.
DISCO's innovative solutions take advantage of its manufacturing technology, including
its own equipment and consumables. For example, it has demonstrated a 60 mm
deep grooving into a soda-lime glass block using a blade dicing saw. It also
demonstrated a 49-mm-deep grooving in a ceramic block using a blade dicing saw.
Dicing processes are automated and require different
dicing blade thickness. Aside from cutting, dicing may involve wax mounting and
scribing. In addition, dicing services may include wafer inspection and die
sorting. The final product can be packaged in a taped hoop, waffle pack, or
gel-pak. To get a quote for dicing services, contact the Dicing Services team
today.
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